? 采用三軸式全自動誤差補償系統(tǒng).

Adopting a three-axis fully automatic error compensation system.

 

?雙料盒模式+同時傳載3片晶圓片.

  Dual material box mode+simultaneous transfer of 3 wafers.

 

?預對準采用非接觸式，避免Wafer損壞和污染。

Prealignment is non-contact to avoid wafer damage and contamination.

 

?多尺寸的規(guī)格夾具.

Multi sized specification fixtures.